Specification 78987

New developed plane target, cylindrical target, twin target, opposite target and various structures of MF sputtering targets. It is widely used in watchband, watchcases, mobile shell, hard wares, tableware etc. It can deposit all kinds of decorative coatings such as TiN, TiC, TiCN, TiAlN, CrN etc decorative coatings.

The Equipment offers coatings in various metal colors such as steel, nickel, gold, bronze, anthracite and black. The color of the coating is determined by its composition, which is composed of zirconium, titanium, nitrogen, carbon, oxygen and other metals. Our process engineering team can fine tune the color according to your requirements, so that you may be unique in your market.Magnetron Sputtering 

Vacuum Coating Equipment includes the following key Features:

  1. Effective: The deposition rate is fast
  2. Compact: Small footprint, easy to integrate into the factory
  3. Accurate: Accurate control of plating thickness
  4. High quality: The film has high purity, good compactness and uniformity
  5. Diversification: Mixed sputtering of different metals, alloys and oxides
  6. Remote access: Provide factory remote diagnostics

Technical Parameters:

Model LEGMSV-1200 LEGMSV-1600 LEGMSV-1900 LEGMSV-2100
Size Ф1200×H1200mm Ф1600×H1200mm Ф1900×H1200mm Ф2100×H2100mm
CoatingMulti-function metal coating,composite membrane, transparent conductive coating, increase return to shoot coating, electromagnetic shielding coating, decorative coating, etc
Power supplyDC magnetron sputtering power supply,MF sputtering power supply,high pressure ion bombard power supply
TargetDC magnetic control target, medium frequency twin target, plane target and cylindrical target
StructureVertical signal door, vertical double doors
Pump system Molecular pump (diffusion pump) + Roots pump + Mechanical pump+Holding pump (optional: turbo pump,poly cold system)
Air systemMass flow controller(1-4road)
Ultimate Vacuum6×10﹣4 Pa（no-loading,clean chamber）
Pumping TimeNo-loading from air to 5×10﹣3 Pa ＜13mins
Workpiece motion mode6 axis / 8axis/9axis public and self rotation/frequency conversion stepless speed regulation
Control modeManual+semi-automatic+Automatic integration/touch screen+PLC
Customized ServiceWelcome to Non-standard and Special requirements,OEM/ODM orders.Customization of inner chamber size, temperature&humidity range,etc.
The technical information will be subjected to change without notice